Dependence of process parameters on stress generation in aluminium thin films

A. B. Horsfall; K. Wang; J. M. M. dos Santos; S. M. Soare; S. J. Bull; N. G. Wright; A. G. ONeill; Jonathan Terry; Anthony Walton; A. M. Gundlach; Tom Stevenson

Dependence of process parameters on stress generation in aluminium thin films

A. B. Horsfall
, K. Wang
, J. M. M. dos Santos
, S. M. Soare
, S. J. Bull
, N. G. Wright
, A. G. ONeill
, Jonathan Terry
, Anthony Walton
, A. M. Gundlach
, Tom Stevenson

School of Engineering

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	482-487
Number of pages	6
Journal	IEEE Transactions on Device and Materials Reliability
Volume	4
Issue number	3
Publication status	Published - 2004

Cite this

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title = "Dependence of process parameters on stress generation in aluminium thin films",

author = "Horsfall, \{A. B.\} and K. Wang and Santos, \{J. M. M. dos\} and Soare, \{S. M.\} and Bull, \{S. J.\} and Wright, \{N. G.\} and ONeill, \{A. G.\} and Jonathan Terry and Anthony Walton and Gundlach, \{A. M.\} and Tom Stevenson",

year = "2004",

language = "Undefined/Unknown",

volume = "4",

pages = "482--487",

journal = "IEEE Transactions on Device and Materials Reliability",

publisher = "Institute of Electrical and Electronics Engineers",

number = "3",

}

TY - JOUR

T1 - Dependence of process parameters on stress generation in aluminium thin films

AU - Horsfall, A. B.

AU - Wang, K.

AU - Santos, J. M. M. dos

AU - Soare, S. M.

AU - Bull, S. J.

AU - Wright, N. G.

AU - ONeill, A. G.

AU - Terry, Jonathan

AU - Walton, Anthony

AU - Gundlach, A. M.

AU - Stevenson, Tom

PY - 2004

Y1 - 2004

M3 - Article

VL - 4

SP - 482

EP - 487

JO - IEEE Transactions on Device and Materials Reliability

JF - IEEE Transactions on Device and Materials Reliability

IS - 3

ER -