Dry etch release processes for micromachining applications

T. Zhu, P. Argyrakis, E. Mastropaolo, I. Gual, K. K. Lee, Rebecca Cheung

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)2553-2557
Number of pages5
JournalJournal of Vacuum Science and Technology B
Volume25
Publication statusPublished - 2007

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