Dry etch release processes for micromachining applications

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2553-2557
Number of pages	5
Journal	Journal of Vacuum Science and Technology B
Volume	25
Publication status	Published - 2007

Cite this

@article{3eceab867d354e3f9055985ba789344f,

title = "Dry etch release processes for micromachining applications",

author = "T. Zhu and P. Argyrakis and E. Mastropaolo and I. Gual and Lee, \{K. K.\} and Rebecca Cheung",

year = "2007",

language = "Undefined/Unknown",

volume = "25",

pages = "2553--2557",

journal = "Journal of Vacuum Science and Technology B",

issn = "1520-8567",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Dry etch release processes for micromachining applications

AU - Zhu, T.

AU - Argyrakis, P.

AU - Mastropaolo, E.

AU - Gual, I.

AU - Lee, K. K.

AU - Cheung, Rebecca

PY - 2007

Y1 - 2007

M3 - Article

SN - 1520-8567

SN - 2166-2754

VL - 25

SP - 2553

EP - 2557

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

ER -