| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 241-253 |
| Number of pages | 13 |
| Journal | Microelectronic Engineering |
| Volume | 32 |
| Publication status | Published - 1996 |
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Dry etching and induced damage
- E. van der Drift
- , Rebecca Cheung
- , T. Zijlstra
Research output: Contribution to journal › Article › peer-review