| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Proceedings of 6th int. conference on ion and plasma assisted techniques |
| Pages | 6 |
| Number of pages | 1 |
| Publication status | Published - 1987 |
Dry etching damage to GaAs and InP
G. F. Doughty, S. Thoms, R. Cheung, C. D. W. Wilkinson
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution