Dry etching damage to GaAs and InP

G. F. Doughty, S. Thoms, R. Cheung, C. D. W. Wilkinson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings of 6th int. conference on ion and plasma assisted techniques
Number of pages1
Publication statusPublished - 1987

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