Dry release fabrication and testing of SiC electrostatic cantilever actuators

L. Jiang, M. Hassan, Rebecca Cheung, A. J. Harris, J. S. Burdess, C. A. Zorman, M. Mehregany

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	106-111
Number of pages	6
Journal	Microelectronic Engineering
Volume	78-79
Publication status	Published - 2005

Cite this

@article{58071be2c726485cbdb2d16d54d915c2,

title = "Dry release fabrication and testing of SiC electrostatic cantilever actuators",

author = "L. Jiang and M. Hassan and Rebecca Cheung and Harris, {A. J.} and Burdess, {J. S.} and Zorman, {C. A.} and M. Mehregany",

year = "2005",

language = "Undefined/Unknown",

volume = "78-79",

pages = "106--111",

journal = "Microelectronic Engineering",

publisher = "Elsevier",

}