Dry release fabrication and testing of SiC electrostatic cantilever actuators

L. Jiang, R. Cheung, M. Hassan, A. J. Harris, J. S. Burdess, C. A. Zorman, M. Mehregany

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationInternational Conference on Micro- and Nano- Engineering
Publication statusPublished - 2004

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