| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 127-134 |
| Number of pages | 8 |
| Journal | Precision Engineering |
| Volume | 11 |
| Issue number | 3 |
| Publication status | Published - 1989 |
Dynamic position measurement technique for flash-on-the-fly wafer exposure
Tom Stevenson, J. R. Jordan
Research output: Contribution to journal › Article › peer-review