Effect of Reactive Ion Etching on Amorphous Carbon Nitride Films

L. Jiang, A. G. Fitzgerald, M. J. Rose, A. M. Gundlach, Rebecca Cheung

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)728-731
Number of pages4
JournalSurface and Interface Analysis
Volume34
Publication statusPublished - 2002

Cite this