Effect of Reactive Ion Etching on Amorphous Carbon Nitride Films

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	728-731
Number of pages	4
Journal	Surface and Interface Analysis
Volume	34
Publication status	Published - 2002

Cite this

@article{2fe0e01adeec44c38c0b3fe5d0859dbe,

title = "Effect of Reactive Ion Etching on Amorphous Carbon Nitride Films",

author = "L. Jiang and Fitzgerald, \{A. G.\} and Rose, \{M. J.\} and Gundlach, \{A. M.\} and Rebecca Cheung",

year = "2002",

language = "Undefined/Unknown",

volume = "34",

pages = "728--731",

journal = "Surface and Interface Analysis",

issn = "1096-9918",

publisher = "Wiley",

}