Effects of Process Chemical Purity on MOS Capacitor Electrical Parameters

I. G. McGillivray, J. M. Robertson, A. J. Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publication5th International Symp. on Silicon Science and Materials
Pages2
Number of pages1
Publication statusPublished - 1986

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