Effects of Process Chemical Purity on MOS Capacitor Electrical Parameters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	5th International Symp. on Silicon Science and Materials
Pages	2
Number of pages	1
Publication status	Published - 1986

Cite this

@inproceedings{a734a19a83b748dca491b56780caa19b,

title = "Effects of Process Chemical Purity on MOS Capacitor Electrical Parameters",

author = "McGillivray, \{I. G.\} and Robertson, \{J. M.\} and Walton, \{A. J.\}",

year = "1986",

language = "Undefined/Unknown",

pages = "2",

booktitle = "5th International Symp. on Silicon Science and Materials",

}