Effects of Reactive ion etching on the electrical characteristics of GaN

B. Rong, Rebecca Cheung, W. Gao, M. M. Alkaisi, R. J. Reeves

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)3467-3470
Number of pages4
JournalJournal of Vacuum Science and Technology B
VolumeB 18
Publication statusPublished - 2000

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