Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems

S. P. Beaumont, C. D. W. Wilkinson, S. Thoms, R. Cheung, I. McIntyre, R. P. Taylor, M. L. Leadbeater, P. C. Main, L. Eaves

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationNanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989)
Publication statusPublished - 1989

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