Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems

S. P. Beaumont; C. D. W. Wilkinson; S. Thoms; R. Cheung; I. McIntyre; R. P. Taylor; M. L. Leadbeater; P. C. Main; L. Eaves

Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems

S. P. Beaumont, C. D. W. Wilkinson, S. Thoms, R. Cheung, I. McIntyre, R. P. Taylor, M. L. Leadbeater, P. C. Main, L. Eaves

School of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989)
Publication status	Published - 1989

Cite this

Beaumont, S. P., Wilkinson, C. D. W., Thoms, S., Cheung, R., McIntyre, I., Taylor, R. P., Leadbeater, M. L., Main, P. C., & Eaves, L. (1989). Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems. In Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989)

Beaumont, S. P. ; Wilkinson, C. D. W. ; Thoms, S. et al. / Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems. Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989). 1989.

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title = "Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems",

author = "Beaumont, \{S. P.\} and Wilkinson, \{C. D. W.\} and S. Thoms and R. Cheung and I. McIntyre and Taylor, \{R. P.\} and Leadbeater, \{M. L.\} and Main, \{P. C.\} and L. Eaves",

year = "1989",

language = "Undefined/Unknown",

booktitle = "Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989)",

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Beaumont, SP, Wilkinson, CDW, Thoms, S, Cheung, R, McIntyre, I, Taylor, RP, Leadbeater, ML, Main, PC & Eaves, L 1989, Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems. in Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989).

Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems. / Beaumont, S. P.; Wilkinson, C. D. W.; Thoms, S. et al.
Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989). 1989.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems

AU - Beaumont, S. P.

AU - Wilkinson, C. D. W.

AU - Thoms, S.

AU - Cheung, R.

AU - McIntyre, I.

AU - Taylor, R. P.

AU - Leadbeater, M. L.

AU - Main, P. C.

AU - Eaves, L.

PY - 1989

Y1 - 1989

M3 - Conference contribution

BT - Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989)

ER -

Beaumont SP, Wilkinson CDW, Thoms S, Cheung R, McIntyre I, Taylor RP et al. Electron beam lithography and dry etching techniques for the fabrication of quantum wires in GaAs and AlGaAs epilayer systems. In Nanostructure Physics and Fabrication, (Proceedings of the International Conference on Nanostructure Physics and Fabrication), edited by M. A. Reed and W. P. Kirk (Academic Press, San Diego, 1989). 1989