Original language | Undefined/Unknown |
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Pages (from-to) | 591-594 |
Number of pages | 4 |
Journal | Microelectronic Engineering |
Volume | 11 |
Publication status | Published - 1990 |
Evaluation of dry etch damage in Nano-structures by direct Transmission Electron Microscopic Examination
Rebecca Cheung, A. Birnie, J. N. Chapman, S. Thoms, C. D. W. Wilkinson
Research output: Contribution to journal › Article › peer-review