Evaluation of dry etch damage in Nano-structures by direct Transmission Electron Microscopic Examination

Rebecca Cheung, A. Birnie, J. N. Chapman, S. Thoms, C. D. W. Wilkinson

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)591-594
Number of pages4
JournalMicroelectronic Engineering
Volume11
Publication statusPublished - 1990

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