Evaluation of dry etch damage in Nano-structures by direct Transmission Electron Microscopic Examination

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	591-594
Number of pages	4
Journal	Microelectronic Engineering
Volume	11
Publication status	Published - 1990

Cite this

@article{1d1cbb19f01c4656809e026af6ff8a4f,

title = "Evaluation of dry etch damage in Nano-structures by direct Transmission Electron Microscopic Examination",

author = "Rebecca Cheung and A. Birnie and Chapman, \{J. N.\} and S. Thoms and Wilkinson, \{C. D. W.\}",

year = "1990",

language = "Undefined/Unknown",

volume = "11",

pages = "591--594",

journal = "Microelectronic Engineering",

publisher = "Elsevier",

}