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Extraction of Sheet Resistance and Line Width From All-Copper ECD Test Structures Fabricated From Silicon Preforms
Byron J. R. Shulver, Andrew Bunting, Alan M. Gundlach, Leslie Haworth, Alan W. S. Ross, Stewart Smith, Anthony J. Snell, Tom Stevenson, Anthony J. Walton, Richard Allen, Michael W. Cresswell
Research output: Contribution to journal › Article › peer-review