Extraction of Sheet Resistance and Line Width From All-Copper ECD Test Structures Fabricated From Silicon Preforms

Byron J. R. Shulver, Andrew Bunting, Alan M. Gundlach, Leslie Haworth, Alan W. S. Ross, Stewart Smith, Anthony J. Snell, Tom Stevenson, Anthony J. Walton, Richard Allen, Michael W. Cresswell

Research output: Contribution to journal › Article › peer-review

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