Extraction of sheet resistance and linewidth from all-copper ECD test structures fabricated from silicon preforms

B.J.R. Shulver, Andrew Bunting, A.M. Gundlach, L.I. Haworth, A.W.S. Ross, S. Smith, Tony Snell, Tom Stevenson, A.J. Walton, R.A. Allen, M.W. Cresswell

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