Extraction of sheet resistance and linewidth from all-copper ECD test structures fabricated from silicon preforms

B.J.R. Shulver, Andrew Bunting, A.M. Gundlach, L.I. Haworth, A.W.S. Ross, S. Smith, Tony Snell, Tom Stevenson, A.J. Walton, R.A. Allen, M.W. Cresswell

Research output: Chapter in Book/Report/Conference proceeding › Other chapter contribution

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