Skip to main navigation Skip to search Skip to main content

Extraction of sheet resistance and linewidth from all-copper ECD test structures fabricated from silicon preforms

  • B.J.R. Shulver
  • , Andrew Bunting
  • , A.M. Gundlach
  • , L.I. Haworth
  • , A.W.S. Ross
  • , S. Smith
  • , Tony Snell
  • , Tom Stevenson
  • , A.J. Walton
  • , R.A. Allen
  • , M.W. Cresswell

Research output: Chapter in Book/Report/Conference proceeding › Other chapter contribution

Filter
Finished

Search results