Fabrication and investigation of 1D and 2D structures in LiNbO3 thin films by pulsed laser ablation

F. Meriche, A. Boudrioua, R. Kremer, E. Dogheche, E. Neiss-Clauss, R. Mouras, A. Fischer, M-R Beghoul, E. Fogarassy, N. Boutaoui

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Lithium niobate thin films were deposited on sapphire substrate by radio-frequency magnetron sputtering technique. One and two dimensional structures have been made using a KrF excimer laser at 248 nm and 6 ns pulse width, under various conditions of ablation, in order to assess the applicability of laser direct-writing of photonic waveguides. The optical and waveguiding properties of LiNbO3 thin films were studied by prism-coupling technique, while micro-Raman spectroscopy was used for structural and composition characterization, as well as laser processing mechanism investigation. The surface morphology of the processed structures was obtained by a Nomarski optical microscope, an atomic force microscope and a White Light Interferometer Microscope. (c) 2010 Elsevier B.V. All rights reserved.

Original languageEnglish
Pages (from-to)1427-1434
Number of pages8
JournalOptical Materials
Issue number11
Publication statusPublished - Sep 2010

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