Fabrication of Hall Device Structures in 3C-SiC using Micro-electro-mechanical Processing Technology

S. Anderson, L. Jiang, Rebecca Cheung, C. A. Zorman, M. Mehregany

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1396-1399
Number of pages	4
Journal	Microelectronic Engineering
Volume	83
Publication status	Published - 2006

Cite this

@article{1d808c8d0e734eb1849dd0d57b080e52,

title = "Fabrication of Hall Device Structures in 3C-SiC using Micro-electro-mechanical Processing Technology",

author = "S. Anderson and L. Jiang and Rebecca Cheung and Zorman, {C. A.} and M. Mehregany",

year = "2006",

language = "Undefined/Unknown",

volume = "83",

pages = "1396--1399",

journal = "Microelectronic Engineering",

publisher = "Elsevier",

}