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Abstract
Prototype imaging subarrays for SCUBA-2 (the Submillimeter Common-User
Bolometer Array) have been fabricated and tested. The pixel count (1280)
of these wafer-scale imagers is significantly larger than any other
low-temperature detectors produced to date, and represents a major step
forward for the low-temperature detector community. These
transition-edge-sensor (TES) based imagers utilize several innovations
including in-focal-plane superconducting quantum intereference device
(SQUID) multiplexers, micromachined Si block absorbers, and
superconducting wafer hybridization. In this paper, we review the
fabrication processes developed for these imagers and present recent
optical data from a prototype imaging subarray.
Original language | English |
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Pages (from-to) | 513-515 |
Journal | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |
Volume | 559 |
Publication status | Published - 1 Apr 2006 |