Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching

L. Jiang, R. Cheung, M. Hassan, A. J. Harris, J. S. Burdess, C. A. Zorman, M. Mehregany

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publication47th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
Publication statusPublished - 2003

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