Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2998-3002
Number of pages	5
Journal	Journal of Vacuum Science and Technology B
Volume	B21
Publication status	Published - 2003

Cite this

@article{e721f3ef41b4416393976db2f26505fe,

title = "Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching",

author = "L. Jiang and Rebecca Cheung and M. Hassan and Harris, \{A. J.\} and Burdess, \{J. S.\} and Zorman, \{C. A.\} and M. Mehregany",

year = "2003",

language = "Undefined/Unknown",

volume = "B21",

pages = "2998--3002",

journal = "Journal of Vacuum Science and Technology B",

issn = "1520-8567",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching

AU - Jiang, L.

AU - Cheung, Rebecca

AU - Hassan, M.

AU - Harris, A. J.

AU - Burdess, J. S.

AU - Zorman, C. A.

AU - Mehregany, M.

PY - 2003

Y1 - 2003

M3 - Article

SN - 1520-8567

SN - 2166-2754

VL - B21

SP - 2998

EP - 3002

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

ER -