Original language | Undefined/Unknown |
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Title of host publication | Proceedings of the Society of Photo-optical Instrumentation Engineers (SPIE) on "Spatial Light Modulators" |
Pages | 9 |
Number of pages | 1 |
Publication status | Published - 1998 |
Fabrication of spatial light modulator backplanes using damascene processing
A. O'Hara, G. Bodammer, D. G. Vass, L. McGhee, J. T. M. Stevenson, I. Underwood
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution