Fabrication of spatial light modulator backplanes using damascene processing

A. O'Hara, G. Bodammer, D. G. Vass, L. McGhee, J. T. M. Stevenson, I. Underwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings of the Society of Photo-optical Instrumentation Engineers (SPIE) on "Spatial Light Modulators"
Number of pages1
Publication statusPublished - 1998

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