Fabrication of spatial light modulator backplanes using damascene processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Proceedings of the Society of Photo-optical Instrumentation Engineers (SPIE) on "Spatial Light Modulators"
Pages	9
Number of pages	1
Publication status	Published - 1998

Cite this

@inproceedings{f0a1ebe3799f451a817e877671cdda18,

title = "Fabrication of spatial light modulator backplanes using damascene processing",

author = "A. O'Hara and G. Bodammer and Vass, \{D. G.\} and L. McGhee and Stevenson, \{J. T. M.\} and I. Underwood",

year = "1998",

language = "Undefined/Unknown",

pages = "9",

booktitle = "Proceedings of the Society of Photo-optical Instrumentation Engineers (SPIE) on {"}Spatial Light Modulators{"}",

}

TY - GEN

T1 - Fabrication of spatial light modulator backplanes using damascene processing

AU - O'Hara, A.

AU - Bodammer, G.

AU - Vass, D. G.

AU - McGhee, L.

AU - Stevenson, J. T. M.

AU - Underwood, I.

PY - 1998

Y1 - 1998

M3 - Conference contribution

SP - 9

BT - Proceedings of the Society of Photo-optical Instrumentation Engineers (SPIE) on "Spatial Light Modulators"

ER -