TY - GEN
T1 - Free-standing parylene C thin films as flexible pH sensing membranes
AU - Trantidou, T.
AU - Tariq, M.
AU - Chang, Y. C.
AU - Toumazou, C.
AU - Prodromakis, T.
PY - 2013/12/19
Y1 - 2013/12/19
N2 - Parylene C has been extensively used as a biocompatible encapsulation material of implantable microdevices. Towards a new understanding of the material's potential, we demonstrate a versatile method that enables the deployment of the material both as an encapsulant and as a H+ sensing membrane in a single flexible platform using discrete MOSFETs to evaluate its chemical sensing performance. A 40-electrode array was implemented through standard microfabrication techniques on a free-standing 5 μm Parylene film. A thin film (1 μm) of Parylene was finally deposited on top of the array to passivate the electrode tracks. O2 plasma treatment was employed to selectively functionalize Parylene's H+ sensing capacity. Measured results indicate a chemical sensitivity of 22.8 mV/pH, while the device exhibits relatively low leakage currents (1.2-13.9 nA) and chemical drifts (10-32 mV/h) over a wide pH range (4-10), rendering Parylene a promising material in the field of flexible bio-sensors.
AB - Parylene C has been extensively used as a biocompatible encapsulation material of implantable microdevices. Towards a new understanding of the material's potential, we demonstrate a versatile method that enables the deployment of the material both as an encapsulant and as a H+ sensing membrane in a single flexible platform using discrete MOSFETs to evaluate its chemical sensing performance. A 40-electrode array was implemented through standard microfabrication techniques on a free-standing 5 μm Parylene film. A thin film (1 μm) of Parylene was finally deposited on top of the array to passivate the electrode tracks. O2 plasma treatment was employed to selectively functionalize Parylene's H+ sensing capacity. Measured results indicate a chemical sensitivity of 22.8 mV/pH, while the device exhibits relatively low leakage currents (1.2-13.9 nA) and chemical drifts (10-32 mV/h) over a wide pH range (4-10), rendering Parylene a promising material in the field of flexible bio-sensors.
UR - http://www.scopus.com/inward/record.url?scp=84893926019&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2013.6688589
DO - 10.1109/ICSENS.2013.6688589
M3 - Conference contribution
AN - SCOPUS:84893926019
SN - 9781467346405
T3 - Proceedings of IEEE Sensors
BT - IEEE SENSORS 2013 - Proceedings
PB - IEEE Computer Society
T2 - 12th IEEE SENSORS 2013 Conference
Y2 - 4 November 2013 through 6 November 2013
ER -