High resolution reactive ion etching of GaN and etch-induced effects

Rebecca Cheung, R. J. Reeves, S. Withanage, E. van der Drift, M. Kamp

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2759-2763
Number of pages5
JournalJournal of Vacuum Science and Technology B
VolumeB17
Publication statusPublished - 1999

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