High Voltage RESURF DMOS Process Development Using Covariance Based Response Surfaces

M. Redford, M. Fallon, A. J. Walton, Z. A. Shaffi, J. McGinty, I. Underwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationInternational Workshop on Statistical Metrology
Pages4
Number of pages1
Publication statusPublished - 1999

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