High Voltage RESURF DMOS Process Development Using Covariance Based Response Surfaces

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	International Workshop on Statistical Metrology
Pages	4
Number of pages	1
Publication status	Published - 1999

Cite this

@inproceedings{dbf9b40321ff47c6b5fe6ec0063d4227,

title = "High Voltage RESURF DMOS Process Development Using Covariance Based Response Surfaces",

author = "M. Redford and M. Fallon and Walton, \{A. J.\} and Shaffi, \{Z. A.\} and J. McGinty and I. Underwood",

year = "1999",

language = "Undefined/Unknown",

pages = "4",

booktitle = "International Workshop on Statistical Metrology",

}