High Voltage Resurf DMOS process Development using DFM Techniques: A Case Study

M. Redford, M. Fallon, Z. A. Shaffi, J. McGinty, N. S. Rankin, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Third International Workshop on Statistical Metrology
Pages	4
Number of pages	1
Publication status	Published - 2007

Cite this

@inproceedings{cd653153e8ab461b9b1924e83ee00ec8,

title = "High Voltage Resurf DMOS process Development using DFM Techniques: A Case Study",

author = "M. Redford and M. Fallon and Shaffi, {Z. A.} and J. McGinty and Rankin, {N. S.} and Walton, {A. J.}",

year = "2007",

language = "Undefined/Unknown",

pages = "4",

booktitle = "Third International Workshop on Statistical Metrology",

}