Hinge Sensitivity in a Micro-Rotating Structure for Predicting Induced Thermo Mechanical Stress in Integrated Circuit Metal Interconnects

J. M. M. dos Santos, K. Wang, S. M. Soare, S. J. Bull, A. B. Horsfall, N. G. Wright, A. G. ONeill, Jonathan Terry, Anthony Walton, A. M. Gundlach, Tom Stevenson

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Pages467-472
Number of pages6
Publication statusPublished - 2004

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