Holographic Test Structures for the Measurement of Linewidth and its Statistical Variation

S. AbuGhazaleh, J. T. M. Stevenson, P. Christie, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	IEEE International Conference on Microelectronic Test Structures
Pages	6
Number of pages	1
Publication status	Published - 1997

Cite this

@inproceedings{a3a7d6df361241c49e359c6c3813137b,

title = "Holographic Test Structures for the Measurement of Linewidth and its Statistical Variation",

author = "S. AbuGhazaleh and Stevenson, {J. T. M.} and P. Christie and Walton, {A. J.}",

year = "1997",

language = "Undefined/Unknown",

pages = "6",

booktitle = "IEEE International Conference on Microelectronic Test Structures",

}