ICMTS 2002

Research output: Contribution to journal › Editorial › peer-review

Original language	English
Pages (from-to)	179-180
Number of pages	2
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	16
Issue number	2
DOIs	https://doi.org/10.1109/TSM.2003.811898
Publication status	Published - May 2003

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@article{a9eea7c055864f25a2054cb23069683c,

title = "ICMTS 2002",

author = "Walton, \{A J\} and A Mathewson and McCarthy, \{K G\} and Anthony Walton",

year = "2003",

month = may,

doi = "10.1109/TSM.2003.811898",

language = "English",

volume = "16",

pages = "179--180",

journal = "IEEE Transactions on Semiconductor Manufacturing",

publisher = "Institute of Electrical and Electronics Engineers",

number = "2",

}