Improved optical performance of silicon backplane SLMs using chemical-mechanical polishing

A. O'Hara, D. G. Vass, I. Underwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationOptical Fabrication and Testing Workshop, OSA technical Digest Series
Pages4
Number of pages1
Publication statusPublished - 1994

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