Original language | Undefined/Unknown |
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Title of host publication | Optical Fabrication and Testing Workshop, OSA technical Digest Series |
Pages | 4 |
Number of pages | 1 |
Publication status | Published - 1994 |
Improved optical performance of silicon backplane SLMs using chemical-mechanical polishing
A. O'Hara, D. G. Vass, I. Underwood
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution