Improved optical performance of silicon backplane SLMs using chemical-mechanical polishing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	Optical Fabrication and Testing Workshop, OSA technical Digest Series
Pages	4
Number of pages	1
Publication status	Published - 1994

Cite this

@inproceedings{fd1d1a3fe01f40bfa6b8a78b91cbb4aa,

title = "Improved optical performance of silicon backplane SLMs using chemical-mechanical polishing",

author = "A. O'Hara and Vass, \{D. G.\} and I. Underwood",

year = "1994",

language = "Undefined/Unknown",

pages = "4",

booktitle = "Optical Fabrication and Testing Workshop, OSA technical Digest Series",

}