Improved test structures for the electrical measurement of feature size on an alternating aperture phase-shifting mask

S Smith, A J Walton, M McCallum, A.C. Hourd, J T M Stevenson, A.W.S. Ross

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on
Pages	17-22
Number of pages	6
Publication status	Published - 2005

Cite this

@inproceedings{cf9bb4bb28994bef911b242d2b3f131b,

title = "Improved test structures for the electrical measurement of feature size on an alternating aperture phase-shifting mask",

author = "S Smith and Walton, {A J} and M McCallum and A.C. Hourd and Stevenson, {J T M} and A.W.S. Ross",

year = "2005",

language = "English",

pages = "17--22",

booktitle = "Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on",

}

Improved test structures for the electrical measurement of feature size on an alternating aperture phase-shifting mask. / Smith, S; Walton, A J; McCallum, M et al.
Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on. 2005. p. 17-22.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Improved test structures for the electrical measurement of feature size on an alternating aperture phase-shifting mask

AU - Smith, S

AU - Walton, A J

AU - McCallum, M

AU - Hourd, A.C.

AU - Stevenson, J T M

AU - Ross, A.W.S.

PY - 2005

Y1 - 2005

M3 - Conference contribution

SP - 17

EP - 22

BT - Microelectronic Test Structures, 2005. ICMTS 2005. Proceedings of the 2005 International Conference on

ER -