Improvement of contact resistances on plasma-exposed Silicon Carbide

Rebecca Cheung, J. Hay, W. Gao, E. van der Drift

Research output: Contribution to journal › Article › peer-review

Cite this

@article{0a9342b197d7454d90c28299feadb42e,

title = "Improvement of contact resistances on plasma-exposed Silicon Carbide",

author = "Rebecca Cheung and J. Hay and W. Gao and Drift, {E. van der}",

year = "2000",

language = "Undefined/Unknown",

volume = "44",

pages = "2081--2083",

journal = "Solid-State Electronics",

publisher = "Elsevier",

}