Improving the Yield and Lifetime of Microfabricated Sensors for Harsh Environments

Ewen Blair, Damion Kevin Corrigan, Hannah Levene, Ilka Schmueser, Jonathan Terry, Stewart Smith, Andrew Mount, Anthony Walton

Research output: Contribution to journalArticlepeer-review

Abstract

This paper details improvements in the design and fabrication of electrodes intended to function in the high temperature, corrosive environment of molten salt. Previously reported devices have displayed low yield and lifetimes and this paper presents two strategies to improve these aspect of their performance. The first one involves reducing the critical area, which increased both the electrode yield and lifetimes. The second element utilised test structures, targeted at identifying failure mechanisms, which helped facilitate the materials/design modifications required to make the devices more robust.
Original languageEnglish
JournalIEEE Transactions on Semiconductor Manufacturing
VolumePP
Issue number99
Early online date14 Jun 2017
DOIs
Publication statusE-pub ahead of print - 14 Jun 2017

Fingerprint Dive into the research topics of 'Improving the Yield and Lifetime of Microfabricated Sensors for Harsh Environments'. Together they form a unique fingerprint.

Cite this