Integrated circuit for measuring mask misalignment

Brian Henderson (Inventor), A. M. Gundlach (Inventor), Anthony Walton (Inventor)

Research output: Patent


An integrated circuit for measuring conductor misalignment comprises: a set of 2n+1 conductor pairs where n is a predetermined positive integer; each conductor pair includes a U-shaped conductor having a central axis; each conductor pair also includes a rectangular shaped conductor having a central axis and which is narrow enough to fit between the legs of the U-shaped conductor provided their central axis are aligned; and the rectangular shaped conductor of each conductor pair has its central axis a distance .delta.+k.DELTA.d from the central axis of the U-shaped conductor where .DELTA.d is a fixed increment, k is an integer between +n and -n that differs for each conductor pair, and a misalignment between the central axis of each conductor pair.
Original languageEnglish
Patent number4647850
IPCH01L 2166
Publication statusPublished - 3 Mar 1987


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