Interdigitated Electrode Modelling for Applications in Dielectrophoresis

C. Chung, S. Smith, A. Menachery, P. Bagnaninchi, R. Pethig, Anthony Walton

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electrical test structures have been designed to enable the characterisation of interdigitated electrode structures in conductive solutions, as used in dielectrophoresis. Test masks have been fabricated to explore the impact of array size, finger separation and solution conductivity on the applied electric field. A circuit model based on a distributed RC network is proposed and evaluated, demonstrating close agreement with actual impedance measurements. This provides the capability to readily predict the voltage and phase along the length of electrodes used for dielectrophoresis and other applications.

Original languageEnglish
Title of host publication2011 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS)
Place of PublicationNEW YORK
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages-
Number of pages6
ISBN (Print)978-1-4244-8527-7
Publication statusPublished - 2011
Event24th IEEE International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam
Duration: 4 Apr 20117 Apr 2011

Conference

Conference24th IEEE International Conference on Microelectronic Test Structures (ICMTS)
CityAmsterdam
Period4/04/117/04/11

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