Original language | Undefined/Unknown |
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Title of host publication | Proceedings of Conference on Advanced Metallization for ULSI Applications |
Pages | 6 |
Number of pages | 1 |
Publication status | Published - 1994 |
Interlevel dielectric planarization to optical tolerances using chemical-mechanical polishing in the fabrication of spatial light modulator backplanes
A. O'Hara, D. G. Vass, I. Underwood
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution