Interlevel dielectric planarization to optical tolerances using chemical-mechanical polishing in the fabrication of spatial light modulator backplanes

A. O'Hara, D. G. Vass, I. Underwood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageUndefined/Unknown
Title of host publicationProceedings of Conference on Advanced Metallization for ULSI Applications
Number of pages1
Publication statusPublished - 1994

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