Interpretation of Capacitance-Voltage Curves for Process Fault Diagnosis: A Machine Learning Expert Systems Approach

J. A. Walls, A. J. Walton, J. M. Robertson, T. M. Crawford, O. R. Vellacot

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	Undefined/Unknown
Title of host publication	IEEE International Conference on Microelectronic Test Structures
Pages	5
Number of pages	1
Publication status	Published - 1988

Cite this

@inproceedings{8d93de3f2531497fa6ce2935ff6bc62f,

title = "Interpretation of Capacitance-Voltage Curves for Process Fault Diagnosis: A Machine Learning Expert Systems Approach",

author = "Walls, {J. A.} and Walton, {A. J.} and Robertson, {J. M.} and Crawford, {T. M.} and Vellacot, {O. R.}",

year = "1988",

language = "Undefined/Unknown",

pages = "5",

booktitle = "IEEE International Conference on Microelectronic Test Structures",

}