Investigation of novel structures on silicon backplane SLMs to improve the device performance

A. O'Hara, G. Bodammer, D. G. Vass, Tom Stevenson, I. D. Rankin, D. C. Burns, Ian Underwood

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)111-117
Number of pages7
JournalOSA Trends in Optics and Photonics, Geoffrey Burdge and Sadik C. Esener, eds. (Optical Society of America, Washington DC)
Volume14
Publication statusPublished - 1997

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