Investigation of novel structures on silicon backplane SLMs to improve the device performance

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Pages (from-to)	111-117
Number of pages	7
Journal	OSA Trends in Optics and Photonics, Geoffrey Burdge and Sadik C. Esener, eds. (Optical Society of America, Washington DC)
Volume	14
Publication status	Published - 1997

Cite this

@article{5dce510338d8437ca93cb1b9a51edc0b,

title = "Investigation of novel structures on silicon backplane SLMs to improve the device performance",

author = "A. O'Hara and G. Bodammer and Vass, \{D. G.\} and Tom Stevenson and Rankin, \{I. D.\} and Burns, \{D. C.\} and Ian Underwood",

year = "1997",

language = "Undefined/Unknown",

volume = "14",

pages = "111--117",

journal = "OSA Trends in Optics and Photonics, Geoffrey Burdge and Sadik C. Esener, eds. (Optical Society of America, Washington DC)",

}

TY - JOUR

T1 - Investigation of novel structures on silicon backplane SLMs to improve the device performance

AU - O'Hara, A.

AU - Bodammer, G.

AU - Vass, D. G.

AU - Stevenson, Tom

AU - Rankin, I. D.

AU - Burns, D. C.

AU - Underwood, Ian

PY - 1997

Y1 - 1997

M3 - Article

VL - 14

SP - 111

EP - 117

JO - OSA Trends in Optics and Photonics, Geoffrey Burdge and Sadik C. Esener, eds. (Optical Society of America, Washington DC)

JF - OSA Trends in Optics and Photonics, Geoffrey Burdge and Sadik C. Esener, eds. (Optical Society of America, Washington DC)

ER -