Junction profiles of sub keV ion implantation for deep sub-quarter micron devices

A. Al-Bayati, S. Tandon, Ruth Doherty, A. Murrell, D. Wagner, M. Foad, B. Adibi, R. Mickevicius, V. Meniailenko, S. Simeonov, A. Jain, D. Sing, C. Ferguson, R. Murto, L. Larson, H. Ryssel (Editor), L. Frey (Editor), J. Gyulai (Editor), H. Glawischnig (Editor)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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