Kinetic approach to gas flows in microchannels

S. Lorenzani*, L. Gibelli, A. Frezzotti, A. Frangi, C. Cercignani

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

A two-dimensional linearized Bhatnagar, Gross, and Krook (BGK) model for the Boltzmann equation has been used to evaluate the damping forces exerted by a gas on the moving surfaces of a micromechanical structure. A very good agreement has been found between our numerical results and the experimental data collected on a silicon biaxial accelerometer in the transitional flow regime. Furthermore, it has been shown that the one-dimensional Reynolds equation fails to predict the squeeze film damping in the two-dimensional structures typical of real MEMS.

Original languageEnglish
Pages (from-to)211-226
Number of pages16
JournalNanoscale and Microscale Thermophysical Engineering
Volume11
Issue number1-2
DOIs
Publication statusPublished - 1 Jan 2007

Keywords

  • BGK Hodel
  • Boltzmann equation
  • Damping forces
  • MEMS

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