Kinetic approach to gas flows in microchannels

S. Lorenzani; L. Gibelli; A. Frezzotti; A. Frangi; C. Cercignani

doi:10.1080/15567260701333489

Kinetic approach to gas flows in microchannels

S. Lorenzani^*, L. Gibelli, A. Frezzotti, A. Frangi, C. Cercignani

^*Corresponding author for this work

School of Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A two-dimensional linearized Bhatnagar, Gross, and Krook (BGK) model for the Boltzmann equation has been used to evaluate the damping forces exerted by a gas on the moving surfaces of a micromechanical structure. A very good agreement has been found between our numerical results and the experimental data collected on a silicon biaxial accelerometer in the transitional flow regime. Furthermore, it has been shown that the one-dimensional Reynolds equation fails to predict the squeeze film damping in the two-dimensional structures typical of real MEMS.

Original language	English
Pages (from-to)	211-226
Number of pages	16
Journal	Nanoscale and Microscale Thermophysical Engineering
Volume	11
Issue number	1-2
DOIs	https://doi.org/10.1080/15567260701333489
Publication status	Published - 1 Jan 2007

Keywords / Materials (for Non-textual outputs)

BGK Hodel
Boltzmann equation
Damping forces
MEMS

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10.1080/15567260701333489

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abstract = "A two-dimensional linearized Bhatnagar, Gross, and Krook (BGK) model for the Boltzmann equation has been used to evaluate the damping forces exerted by a gas on the moving surfaces of a micromechanical structure. A very good agreement has been found between our numerical results and the experimental data collected on a silicon biaxial accelerometer in the transitional flow regime. Furthermore, it has been shown that the one-dimensional Reynolds equation fails to predict the squeeze film damping in the two-dimensional structures typical of real MEMS.",

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author = "S. Lorenzani and L. Gibelli and A. Frezzotti and A. Frangi and C. Cercignani",

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T1 - Kinetic approach to gas flows in microchannels

AU - Lorenzani, S.

AU - Gibelli, L.

AU - Frezzotti, A.

AU - Frangi, A.

AU - Cercignani, C.

PY - 2007/1/1

Y1 - 2007/1/1

N2 - A two-dimensional linearized Bhatnagar, Gross, and Krook (BGK) model for the Boltzmann equation has been used to evaluate the damping forces exerted by a gas on the moving surfaces of a micromechanical structure. A very good agreement has been found between our numerical results and the experimental data collected on a silicon biaxial accelerometer in the transitional flow regime. Furthermore, it has been shown that the one-dimensional Reynolds equation fails to predict the squeeze film damping in the two-dimensional structures typical of real MEMS.

AB - A two-dimensional linearized Bhatnagar, Gross, and Krook (BGK) model for the Boltzmann equation has been used to evaluate the damping forces exerted by a gas on the moving surfaces of a micromechanical structure. A very good agreement has been found between our numerical results and the experimental data collected on a silicon biaxial accelerometer in the transitional flow regime. Furthermore, it has been shown that the one-dimensional Reynolds equation fails to predict the squeeze film damping in the two-dimensional structures typical of real MEMS.

KW - BGK Hodel

KW - Boltzmann equation

KW - Damping forces

KW - MEMS

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U2 - 10.1080/15567260701333489

DO - 10.1080/15567260701333489

M3 - Article

AN - SCOPUS:34250185682

SN - 1556-7265

VL - 11

SP - 211

EP - 226

JO - Nanoscale and Microscale Thermophysical Engineering

JF - Nanoscale and Microscale Thermophysical Engineering

IS - 1-2

ER -

Kinetic approach to gas flows in microchannels

Abstract

Keywords / Materials (for Non-textual outputs)

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